CIP (Continuous Improvement Process)

Handheld Fork

Problem: When the machine malfunctions, the robot cannot operate normally.
Solution: Use a handheld fork to retrieve and transfer wafers from the loadlock to foup for storage.
Benefit: Prevents direct handling with bare hands, thus avoiding contamination and preserving wafer cleanliness.

Contactless Loadlock Height Measuring Gauge

Benefit:

• Detects blade height to prevent wafer scratching during transfer
• Utilizes optical sensing to replace traditional contact-based distance measurement

Sensor Positioning Device

Problem: Traditional robot alignment and positioning rely on visual inspection.
Solution: Use a sensor-calibrated fixed position as a reference point to detect any deviation in the robot's position.
Benefit: The sensor can store detection data, enabling quantitative analysis.

RF(Radio frequency) shielding

Problem: The receiver is susceptible to interference from devices that emit electromagnetic waves, leading to incorrect commands.
Solution: Use permalloy for efficient magnetic field shielding to isolate electromagnetic waves.
Benefits: Significantly reduces electronic signal interference.

Hood Connected Curtain Accry

Problem: Prevent residual gases from escaping the chamber during PM
Solution:

• Use a mask to reduce inhalation of residual gases by PM personnel
• Restrict gas leakage and simultaneously use a CV tube to extract remaining gases

Shower Head Purge Gauge

Problem: How to improve the cleanliness of the shower head
Solution:

• Perform pump and vent cycles using nitrogen
• Blow out residual particles from the shower head nozzles to meet cleanliness requirements